Combinatorial optimization of transparent conducting oxides (TCOs) for PV

Transparent conducting oxides (TCOs) can serve a variety of important functions in thin film photovoltaics such as transparent electrical contacts, antireflection coatings and chemical barriers. Two areas of particular interest are TCOs that can be deposited at low temperatures and TCOs with high carrier mobilities. We have employed combinatorial high-throughput approaches to investigate both these areas. Conductivities of /spl sigma/ = 2500 /spl Omega//sup -1/-cm/sup -1/ have been obtained for In-Zn-O (IZO) films deposited at 100/spl deg/C and /spl sigma/ > 5000 /spl Omega//sup -1/-cm/sup -1/ for In-Ti-O (ITiO) and In-Mo-O (IMO) films deposited at 550/spl deg/C. The highest mobility obtained was 83 cm/sup 2//V-sec for ITiO deposited at 550/spl deg/C.