Trapping and detrapping kinetics in metal gate/HfO/sub 2/ stacks

In this work, we study the trapping and detrapping kinetics over a large range of temperature from 20K to 500K with an appropriate methodology. Through the experimental work, we report, for the first time, the importance of the direct tunneling (especially Shockley-Read-Hall (SRH-like)) mechanism for all operational conditions.