Design of inductor operating in GHz ranges

Air core type inductors have been widely used as passive inductive components in RF circuits to achieve high Q. However, the loss effect of Si substrate by stray magnetic field makes the performance of inductors and other components deteriorate tremendously in RF frequency ranges. Therefore, the objective of this work is to optimize the design of thin film inductors with magnetic cores for the improvement of R, L and Q values and the reduction of magnetic stray field.