Microfluxgates performances improvement in microtechnology

Two different technological types of microfluxgate sensors that able to cancel magnetic instabilities and measure magnetic field at the nanoTesla level are presented. The first type has a flat conductive layer deposited inside, above or under the technological solenoidal stack while the second one has a conductive solenoidal coil (with a magnetic core) deposited at the same levels as the microfluxgate technological stack. The effect of stabilization of the output signal of these microfluxgates is investigated.