Implementation of the SEMI 'Generic Equipment Model' using object-based cell technology

A method was sought for developing a general-purpose automation platform for a large-capacity 4 Mbit DRAM production facility. Various technological approaches were evaluated ranging from simple messaging systems to programmer toolkits to an 'object-based cell' approach that meets the stated goal of 'enabling' the process engineer. Because of the message passing and dynamic binding nature of object-based cell technology, principal elements of the SEMI (Semiconductor Equipment and Materials International) Generic Equipment Model (GEM) could be implemented in a straightforward manner, including event classes, finite state machine control, spooling, logging, material movement control, data reporting, and process program management. The SEMI GEM definition document was used as a generic template for specifying particular production applications as well as the general capabilities for equipment management.<
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