Fabrication of hfc coated Si field emitter arrays with a built-in poly-Si TFT

Field emission display (FED) is one of the promising next generation emissive flat panel display. We demonstrated MOSFET-structured Si FEA for stable and low-driving-voltage active-matrix FED”. For the large area display, however, MOSFET is not suitable due to restriction of Si substrate (size and cost). TFT technology using glass substrate can be a good solution for this purpose. Some researchers have reported TFT-controlled FED using amorphous-Si (a-Si) on glass substrate2)