A systems approach to 1-µm NMOS

In 1977, groups from diverse disciplines at Bell Labs were brought together for the first time, with the goal of applying a systems approach to high-performance NMOS technology. These groups, namely, solid-state physics, device design, materials, processing, and lithography found a symbiotic relationship that has produced not only NMOS devices with unparalleled performance, but also improved materials, processes, and tools-many of which are in production today.