A configuration for high flow rate, high efficiency and low pressure loss micromachined active air filtration element for airborne micro-nanoscale particles separation and removal

To address the demand for high performance localized air filtration systems, we developed a configuration for high flow rate, high efficiency and low pressure loss micromachined active air filtration element for airborne micro-nanoscale particles separation and removal. It consumes low power of less than 4 mW and is able to operate at a flow rate of 1.6L/min per device. The unipolar charger and separator electrodes are fabricated on the same substrate for close proximity to minimize charge loss due to particle diffusion. A straight air channel with uniform cross-section between the inlet and outlet minimizes pressure loss, maximizes operational flow rate, and ensures laminar flow for effective particle separation and removal. A flow divider before the outlet physically separates the particle-laden and cleaned air before they exit the separator electrodes' electric field.