A 32-channel active high density connector for biomedical applications

A 32-channel micromachined connector with active buffers for use with implanted neural recording probes has been fabricated and tested. The connector operates by lowering an array of micromachined polyimide cantilever beams onto a corresponding array of gold bumps on the probe back end. The connector has a footprint of 5.9/spl times/5.1mm/sup 2/ and a height of 5.1mm, small enough to fit on a rat skull. Reliability characterization of the connector was performed by repeated connection/disconnection cycles. Testing showed that electrical contacts were formed 99.6% of the time. Electrical characterization has determined the average contact resistance for each channel is 205m/spl Omega/ at 1kHz and the cross-talk between channels is -51.5dB. RMS noise for the entire connector assembly from 100-10,000Hz is 53.4/spl mu/V.