Optical interconnect modules with fully integrated reflector mirrors

A robust and cost-effective technology for integration of 45/spl deg/ reflector mirrors and polymer waveguides (WGs) into optical interconnect (OI) substrates is developed. The planar WGs are formed from photopatternable polymers with propagation losses as low as 0.05 dB/cm. The mirrors with losses of 0.5-0.8 dB are fabricated by the microdicing technique allowing lateral and vertical positioning of the mirror plane within several microns. A prototype OI module with integrated channel WGs, mirrors, and assembled connectors is fabricated and successfully tested at 10-Gb/s transmission rate.