ZnO thin films growth, characteristics and applications

Undoped, n-doped and p-type ZnO as well as MgZnO alloy thin films were grown by metal-organic chemical vapor deposition (MOCVD) on sapphire. The structural, optical and electrical properties of ZnO films were investigated using X-ray diffraction (XRD), Raman spectrum, photoluminescence (PL) spectrum, transmission spectra and Hall effect, respectively. ZnO ultraviolet (UV) detectors and acoustic surface wave filter (ASWF) devices were fabricated. Additionally, a new ZnO transistor structure was proposed.