The study on a voltage controlled capacitor with complex membrane

A study on the design and fabrication of a three-paired-electrodes voltage controlled capacitor (VCC) with complex membrane on a high-resistivity silicon substrate is reported. The complex membrane is composed of 0.8 micron Al and 0.15 micron SiON realized using sputtering and the PECVD process. The suspended membrane structure is obtained with polyimide as the sacrificial layer. The fabricated device was measured and survived for more than 1 million actuation times.