A novel silicon-based CBCPW-fed CBCPS ring resonator

A silicon-based uni-planar CBCPW-fed CBCPS ring resonator is introduced for the first time. The simulated Q-factor of CBCPS ring is higher than that of the microstrip line (MSL) ring and a weak parasite resonant phenomenon is existed in spectrum response of the CBCPS ring resonator due to the crosstalk of the PP (parallel plate) modes. The micromachined fabrication process is employed to fabricate the designed planar resonator. The measured unloading Q-factors of the CBCPS ring resonator are 53.5 at 10.62GHz, 45 at the second resonant frequency 20.93GHz.