A 20kw 6KHz PRF compact water cooled supply for high repetition rate excimer lasers

As integrated circuit feature size maintains pace with Moore's law, the demands of DUV light sources and excimer lasers grow ever more challenging. Each DUV excimer laser requires a power supply capable of delivering rapid, and accurate, high voltage pulses at extremely high repetition rates. This paper presents a new design of power supply that can deliver 20 kW average power at voltages up to 2500 V, repetition rates up to 6 kHz, and pulse-to-pulse stability a low as plusmn1.25 Volts