Single-chip AFM array with integrated digital controllers

We present the first single-chip system for parallel, multi-cantilever AFM imaging and surface characterization, comprising autosensing cantilevers with height actuation, programmable PID feedback controllers and a digital interface. Other distinctive features include integrated reference cantilevers for effective sensor offset compensation and programmable offset and gain stages. Each cantilever has its own PID controller and is operated independently and in parallel with the others. The system has a high level of flexibility and permits different operating modes, notably constant-force atomic force imaging and force-distance surface characterization.