Dynamic analysis of AT-cut quartz resonators with ANSYS

In this work, dynamic analysis of AT-cut quartz resonators using 3D finite element models of commercial package ANSYS is carried out. The validity of the numerical analysis for the problems with ANSYS is verified through simulation results. It is shown that comparing with commonly used Mindlin plate theory based analytical or numerical methods for the problems, the 3D simulations with ANSYS are not restricted to specific simplified-theories or boundary conditions, and can be applied to more general situations. As long as FE models are properly established the advantages of modelling and simulation with 3D FE software, such as ANSYS, will be revealed for the problems with complicated structures and boundary conditions, such as dynamic analysis of multichannel quartz crystal micro-balances.