A simple distributed model for cMUT [micromachined capacitive ultrasonic transducers]

A simple distributed model is presented and compared with an FEM model. A good agreement is observed for collapse voltage and resonance frequency values. "Master curves" to aid cMUT design, such as normalized capacitance and coupling factor, are defined as a function of normalized bias voltage. Next, the cMUT dynamic behavior is investigated through its electrical impedance and comparison is made with measurements.