Study of layered SAW devices operating at different modes for gas sensing applications

In this paper, the behaviour of different propagation modes in layered ZnO/XZ LiNbO/sub 3/ surface acoustic wave (SAW) devices is investigated both theoretically and experimentally. Propagation properties of the structures are theoretically investigated using the multilayered spectral Green's function. The gas-sensing performance of these transducers for different ZnO layer thicknesses is observed. Additionally, the gas-sensing behaviour of different propagating modes is presented.