A thermally driven tunable TFBAR bandpass filter

A tunable handpass filter based on TFBARs bas been realized by micro-machined thin film AIN devices. For tuning the center frequency, a MO micro heating Line is integrated with TFBARs. As applying the de voltage from 0 to 11.6 V to the resistive heating Line, the center frequency of a PCS band TFBAR filter with a bandwidth of 60 MHz is varied from 1.779 to 1.762 GHz (17 MHz shift).