High quality solenoid inductor for dielectric multi-chip module (D-MCM)

For multilayer applications, we made high quality and easily fabricable solenoid inductor using dielectric material (UPILEX-S, UBE Industries). These inductors fabricated on UPILEX-S had larger Q-factor compared to that of spiral inductor fabricated on Silicon or GaAs substrate. Furthermore, it is possible to stack these inductors to make multiship module (MCM) using solder or gold stud bumps. From the measuremeut, solenoid iuductors fabricated on 50 pm thick fdm showed peak Q-factors of above 25 at 6 GHz with inductance from 2nH to 5.1nH for a wide range of high frequency.