Yield analysis of optical MEMS assembly Process using a Monte Carlo Simulation technique

We developed a statistical Monte Carlo technique for the performance estimation of optical microelectromechanical systems (MEMS) components taking into account the randomness nature of its assembly. The developed technique is applied on the 2/spl times/2 moving mirror optical MEMS switch as a typical example to study its performance under realistic passive-alignment conditions. The obtained results enable us to evaluate the assembly process capability and to analyze the performance sensitivity to different fabrication parameters. This enables us to establish a design for manufacturability technique for the optical MEMS components.