Design and fabrication of micro thermoelectric cooler on LTCC substrate

The work presents the design and fabrication of micro thermoelectric cooler (TEC) using LTCC process and SMT technique. Two micro thermoelectric module prototypes illustrate the construction and performance of the micro TECs. The micro TEC performance simulation results of the micro thermoelectric module indicate that the maximal parameters and performance curves can be optimized based on maximum current (I/sub max/), maximum voltage (V/sub max/), maximum cooling power (Q/sub max/) and maximum temperature difference (/spl Delta/T/sub max/).