Real 3D electro-thermal simulation and analysis for ESD protection structures

This paper presents a three-dimensional electro-thermal analysis for ESD (electrostatic discharge) protection structures, aiming for accurately predicting ESD electro-thermal failure threshold and better understanding ESD protection device thermal resistance. An accurate 3D electro-thermal analysis method using real 3D TCAD simulation as presented in Taurus-process user guide (2003) and Taurus-device user guide (2003) was developed. 3D simulation was compared with experimental data using transmission line pulse (TLP) measurements for characterizing ESD protection devices. Accurate electro-thermal analysis is essential to understanding thermal behaviors of ESD protection structures under high-current stressing.