The nanostructured Origami/sup TM/ 3D fabrication and assembly process for nanomanufacturing

Nanostructured Origami/sup TM/ 3D fabrication and assembly process is a method of manufacturing 3D nanosystems using exclusively 2D litho tools. The 3D structure is obtained by folding a nanopatterned 2D substrate. We report on the materials, actuation, and modeling aspects of the manufacturing process, and present experimental results from fabricated structures.