A digital feedback damping scheme for a micromachined directional microphone

In this paper, a method for introducing active damping for a diaphragm in a micromachined directional microphone is considered. The sigma-delta modulation is used to circumvent the nonlinearity of the capacitive transducers of the microphone. The principle of operation of the damping scheme is explained, and the simulation results of a lumped diaphragm model are presented.