Measurement of resonant microbeam pressure sensors

Operation and measurement of an electro-thermally excited resonant pressure sensor are described. An open-loop measuring system with lock-in amplification technology is established to assess the characteristics of the beam resonator and in order to solve the problem of detecting dynamic relationships between various sensors' output frequency and their applied conditions, a close-loop data-acquisition system is developed and the gage factor, temperature sensitivity and frequency stability are measured with the system.