Add-drop filters utilizing vertically-coupled microdisk resonators in silicon

This paper reports the fabrication and characterization of add-drop filters based on vertically coupled microdisk resonators in silicon. SIMOX 3-D sculpting is the technique used to fabricate monolithically integrated filters based on microdisk resonator structures that show adjacent channel cross talk suppression as high as 15 dB for channels that are separated by 1.5 nm.