A nonvolatile programmable solid electrolyte nanometer switch

This paper presents a nanometer-scale nonvolatile switch composed of a solid electrolyte which is <30 nm and has an on-resistance <100 /spl Omega/. A field programmable logic device and 1 kb nonvolatile memory using the switch are demonstrated. The crossbar switch is fabricated in a 1.8 V 0.18 /spl mu/m CMOS process.