A 0.18 /spl mu/m 3.0 V 64 Mb non-volatile phase-transition random-access memory (PRAM)

A non-volatile 64 Mb phase-transition RAM is developed by fully integrating a chalcogenide alloy GST (Ge/sub 2/Sb/sub 2/Te/sub 5/) into 0.18 /spl mu/m CMOS technology. This alloy is programmed by resistive heating. To optimize SET/RESET distribution, a 512 kb sub-core architecture, featuring meshed ground line, is proposed. Random read access and write access for SET/RESET are 60 ns, 120 ns and 50 ns, respectively, at 3.0 and 30/spl deg/C.