A DC-to-32 GHz 2-bit MEMS phase shifter

Microwave and millimeter-wave phase shifters are essential components in radar systems, wireless and satellite broadband communication networks. RF MEMS technology provides a possibility solution for this. A 2-bit DC-to-32 GHz DMTL phase shifter was prepared on high-resistivity silicon substrate in this paper, and a novel "ground-actuation" configuration is proposed for the first time to reduce the actuation voltage.