Soft magnetic properties of Co/sub 69.9/Fe/sub 20.5/Al/sub 4.4/O/sub 5.2/ thin films

Nanocrystalline CoFeAlO thin films have been fabricated for the application of ultrahigh frequency devices. A Co/sub 69.9/Fe/sub 20.5/Al/sub 4.4/O/sub 5.2/ thin film is observed to exhibit good magnetic properties: magnetic coercivity (H/sub c/) of 0.8 Oe; anisotropy field (H/sub k/) of 23.9 Oe; saturation magnetization (4/spl pi/M/sub s/) of 18.1 kG, and electrical resistivity (/spl rho/) of 560.67 /spl mu//spl Omega/cm. The frequency response of permeability of these films is excellent. The effective permeability (/spl mu//sub eff/) of 1024 is stable up to 1 GHz.