A study on the development of a micro-positioning device for forming milli-structures

In this paper, error compensation using an error budget method for repeatability improvement of the micro-positioning system was studied. The micro-positioning system was developed for a micro-pressing machine. Error compensation using an error budget method was applied and accumulated error was minimized. In this study, the error model was derived and error compensation was performed through the experiments. We can get an improvement of the precision in experiment system.