Simultaneous switching noise suppression using hydrothermal barium titanate thin film capacitors

This paper reports the integration of hydrothermal barium titanate thin film embedded capacitors in organic printed wiring boards. These capacitors have 300 nm thick dielectrics with k>350, can attain capacitances of 1 /spl mu/F/cm/sup 2/ and are ideal for decoupling applications. In order to evaluate these films for simultaneous switching noise suppression, a clock distribution network was designed using a clock driver with one input and four differential outputs. The design consists of a clock driver and four pairs of impedance controlled transmission lines with embedded decoupling capacitors. In order to evaluate the effects of capacitance value and the type of capacitor /sub i/screte vs. embedded, coupons with different embedded capacitance values and discrete capacitors were fabricated on the same board. The fabricated structures were simulated using the transmission matrix method (TMM) in the frequency domain and a macromodeling method in the time domain. This paper demonstrates for the first time that the simple low-cost, aqueous based low-temperature film growth technique can provide the best solution for embedded decoupling capacitor problems in organic packages.