Secondary electron emission database

We have designed a unique measurement system that will enable backscattered electron data collection in the complete (energy and angle) parameter space. Specifically, this design allows for the incident beam energy to extend from 50 eV up to 30 keV. Secondly, sample rotation allows for variation of the incident angle. Finally, and most importantly, the moveable detector, which can travel in two independent angular directions, can cover the entire 3D emission space and measure the emitted electrons with an angular resolution of 2/spl deg/.