Development and extraction of high-frequency SPICE models for metal-insulator-metal capacitors

In the framework of a lumped-element SPICE model, we extract RF parameters for a MIM capacitor, such as series resistance and inductance. The extraction method is validated through a "dummy" MIM capacitor where the dielectric layer is omitted during the fabrication process. A distributed model provides a good fit to measured data; fits to Q(f) and C(f) are replicated using a lumped model as well.