Effect of TCO coated substrate and p-layer on performance of microcrystalline silicon solar cells

Undoped microcrystalline silicon films have been deposited by VHF-PECVD on glass and on glass/p-type /spl mu/c-Si:H (300 /spl Aring/) layer. The p-layer acts as seeding layer and changes the structure of i-layer as observed by Raman studies. Performance of single junction solar cell has been studied varying p-layer thickness and crystallinity of i-layer. The effect of different p layer on the performance of solar cell also has been investigated. The textured ZnO has been developed by magnetron sputtering under Ar+O/sub 2/ ambient. Effect of substrate coated with different transparent conducting oxides (SnO/sub 2/, ZnO and SnO/sub 2//ZnO double layer) on the performance of microcrystalline Si solar cells have been studied and correlated with the properties of the TCO.