Topography correlation - a powerful tool applied to the visualisation of remote plasma hydrogen passivation effects

We present a mathematical method for correlation of two topograms based on a coordinate transformation. The method is used to calculate high-resolution topograms of the normalised recombination strength /spl Gamma/ of the dislocations, by correlating light beam induced current maps with dislocation density maps. Topograms of the ratio of the IQE after and before microwave induced remote plasma hydrogen passivation (MIRHP) are presented. The passivation effect at dislocations is monitored through /spl Gamma/-topograms for temperatures of the MIRHP process between 300/spl deg/C and 375/spl deg/C.