Micro-holes in gold foils machined by excimer laser ablation

Micro-holes in gold foils were machined by excimer laser ablation, to provide a useful micro-process for manufacturing a flat plane wire winding and transformer. The mechanisms of the excimer laser ablation were described. There are two classes of laser ablation mechanisms that are the excimer laser-induced thermodynamics process and the interaction process of photons, phonons and electrons generated by the laser plasma. In these experiments, the laser pulse energy, repetition frequency and pulse number were, respectively, set to 200-350 mJ, 50-150 Hz and 300-1000. We observed atomic force micrographs of holes in the gold foil. The thickness of the gold foil is 20-25 /spl mu/m. The diameter of the holes in the gold foil is 20-40 /spl mu/m.