Full-chip, three-dimensional shapes-based RLC extraction

In this paper, we report the development of a full-chip, three-dimensional, shapes-based, resistence-inductance-capacitance extraction tool, which was developed as part of a university-industry collaboration. The technique of return-limited inductances is used to provide a sparse, frequency-independent inductance and resistance network with self-inductances that represent sensible "nominal" values in the absence of mutual coupling. Mutual inductances are extracted for accurate crosstalk analysis. The tool exploits high-capacity scan-band techniques and disk caching. Accuracy is validated by comparison with full-wave finite-element field solvers.