Nanocalorimetric devices with thermoelectric PECVD p-Si/sub 1-x/Ge/sub x/ thin film layers for the analysis of biological phase transitions

In order to realise thermoelectric devices for sensors, coolers, and energy conversion systems the technology of thin film thermoelectric materials has to be developed. We present our progress in the development and application of thin PECVD-films of the widely used Si/sub 1-x/Ge/sub x/ as a thermoelectric material. We report on the development and the properties of high quality boron doped p-Si/sub 1-x/Ge/sub x/ PECVD-layers with power factors up to 12 /spl mu/W/cmK/sup 2/. Using these layers a concept was developed and a technology of a MEMS related calorimetric device for biotechnological applications was realised. We report on the properties of first calorimeters. Calorimetric data will be given using the phase transition of DMPC-emulsions diluted in aqueous solution. DMPC (Dimyristoylphosphatidylchloline) is a phospholipid forming multilamelar vesicles or membrane bilayers in water.