Effects of annealing condition on thermal sensing characteristics of Ba/sub 1-x/Sr/sub x/TiO/sub 3/ thin-film resistor

Barium strontium titanate (Ba/sub 1-x/Sr/sub x/TiO/sub 3/) thin-film resistor is fabricated on a SiO/sub 2//Si substrate by argon ion-beam sputtering technique. Thermal sensitivity characteristics of the resistor are investigated, and the results show that the thin-film resistor has good thermal sensitivity with negative temperature coefficient. Moreover, the effects of annealing condition on thermal sensing properties of the resistor are studied.