Design and fabrication of curved micromirrors using the MultiPoly process

This paper presents the design and fabrication of reflective curved micromirrors with pre-determined static shapes. The fabrication of these devices uses conventional surface micromachining technology and the MultiPoly process (Yang et al., 2000), which is a technique for depositing multilayers of LPCVD polysilicon in order to control the overall stress and stress gradient. The inexpensive fabrication of these micromirrors allows for a range of designs that could address many applications, including optical switches.