High performance MEMS-based 8/spl times/8-port optical switch

This paper presents the design and measured optical performance of a MEMS-based 8/spl times/8-port fiberoptic switch. The device uses a novel two-chip construction to achieve precise MEMS mirror positioning, resulting in insertion loss uniformity within 1 dB and repeatability of less than 0.12 dB. Measurements of six representative 8/spl times/8 switches show a worst-case insertion loss of 2 dB, while typical insertion loss is better than 1.4 dB.