A very compact RF MEMS switch for frequencies up to 50 GHz

A scaled, smaller version of the recently published toggle switch, an extremely broad band and highly linear ohmic RF MEMS switch for a frequency range from DC to 50 GHz, is presented. The electromagnetic simulation, the fabrication process, and measured results of the small toggle switch are given. The switch in its smaller geometry inherits the outstanding RF performances which could even be extended with an insertion loss of 0.95 dB and an isolation of 16 dB up to 50 GHz. These measurement results are in good agreement with the simulation. Power measurements results are in good agreement with the simulation. Power measurements (2 W) in the frequency range from 8 to 18 GHz did not show a self actuation of the switch.