Feedback amplifier based on an embedded HEMT in thin-film multilayer MCM-D technology

In this paper a feedback amplifier circuit integrated in MCM-D (MultiChip Module with Deposited thin films) on glass technology is presented. The active device of the amplifier is a thin-film Ge (germanium) -based HEMT. The HEMT is embedded in the bottom dielectric layer of the MCM-D. The combination of passive MCM-D technology and HEMTs on Ge allows for efficient semimonolithic integration of active devices and realization of MCMs with embedded passive and active components for amplifier circuits.