Design issues in gas cluster ion beamlines

The design of gas cluster ion beam (GCIB) equipment is complicated by a number of issues unique to such beams. Ion charge and mass are typically not known but instead follow rather broad distributions. Space charge becomes important at much lower current levels than in implant equipment due to the very high mass of the ions. The beam, itself, transports a significant amount of gas and this gas load must be taken into account in the design. The novel issues of GCIB are discussed here and solutions are presented.