Stability improvement of Therma-Wave signal by pre-annealing

In this study, we investigated causes of fluctuation of Therma-Wave(TW) signals in order to improve the stability of TW signal measurement. In case of heavy ion implantation, several causes were found, and pre-annealing before implantation showed the most effective contribution to improve the fluctuation. It is from 2.13% to 0.41% (1σ) in case of In
⁺
implantation. This paper presents innovative improvement of the TW signal stability by the pre-annealing and other methods.