Analytical modelling and simulations of a MEMS micro-mirror - MATLAB implementation

This paper is devoted to the study of the static and dynamical behaviour of a ID torsion single crystal silicon micro-mirror. The aim is to create a parametric model of such mirror allowing to use a simple calculation program to avoid expensive and long FEM simulations. This study tries to put in place a modelling to define the best structure with regard to various specification by taking into account the technological possibilities and to simulate the experimental characteristics before the expensive technological process.