Outlook of low temperature poly silicon (LTPS) technology for information display and beyond

This paper examined several key technologies and their advances involved in the use of p-Si TFTs for AMLCDs. While the technologies required to build p-Si TFTs on large area substrates are less mature than those used to build a-Si devices, rapid progress is being made. The approaches to low cost, high performance p-Si TFTs which will meet the future requirements will be dictated by the LCD product requirements. By combining these technologies, LTPS will be the devices of choice for high resolution LCDs as well as the possibility of increased functionality on large area substrates with intriguing system opportunities.