Microwave and physical behavior of micro-machined structures on membrane for space applications

This article addresses the reliability of micro-machined structures on membrane. RF filters on membrane have been used. The aim of the present work is to prove that these micro-electro-mechanical structures (MEMS) possess an adequate behavior with respect to spatial constraints. We studied the S parameter evolution in function of the temperature and the mechanical reliability towards shocks and vibration. The structures show a very good resistance towards these preliminary constraints.